Emi OSAKA

Influence of WO3 film microstructure on the charge and discharge reaction in a thin film device type capacitor

Kazunori SATO

In the solid thin film device that combines the lithium ion conductive glass electrolyte with the WO3 electrode, generation of the capacity due to the electyochemical reaction and electrochemical double layer is expected.However, the reaction solids at the solid-interface on the electrolyte and the surface of the electrode has not been clarified.The morphology and crystal orientation of the WO3 thin film electrode have been investigated in order to clarity their effects on between the WO3 electrode and the lithium ion conductive glass electrolyte. The WO3 thin film electrode was prepared by the low pressure magnetron sputtering system. The crystal structure of the WO3 thin film was found to be orthorhombic with the (001) crystal orientation. Increasa in the contact area between the electrode and elective is indispensable for the enhancement of the electrochemcal reaction with the (001) crystal orientation, which is favorable for the diffusion of litium ions.